Pulsed Laser Deposition (PLD) Unit



Image of the Instrument

Pulsed Laser Deposition (PLD) Unit: This is a Pulsed Excimer Laser based thin film deposition unit. The Excimer laser (Compex Pro made by Coherent Inc.) delivers a maximum of 700 mJ power at the wavelengths of 193 nm (ArF) and 248 nm (KrF) with a repetition rate of 10 Hz. The deposition chamber (Ms. Excel Instruments) is equipped with turbo pump (base 10–7 pressure ~ 10 mbar) and works under various gaseous environment. The substrate can be heated up to 900oC and it has six automated target carousel.